JPH0485720U - - Google Patents
Info
- Publication number
- JPH0485720U JPH0485720U JP12660990U JP12660990U JPH0485720U JP H0485720 U JPH0485720 U JP H0485720U JP 12660990 U JP12660990 U JP 12660990U JP 12660990 U JP12660990 U JP 12660990U JP H0485720 U JPH0485720 U JP H0485720U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- photo sensor
- cap
- detection device
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12660990U JPH0485720U (en]) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12660990U JPH0485720U (en]) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485720U true JPH0485720U (en]) | 1992-07-24 |
Family
ID=31874154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12660990U Pending JPH0485720U (en]) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485720U (en]) |
-
1990
- 1990-11-30 JP JP12660990U patent/JPH0485720U/ja active Pending